How does EUV Lithography Work? Inside the Most Advanced Machine Ever Made 🛠️⚙️🤯

Tavsif:

Inside microchips are nanometer-sized transistors and wires, but how are these nanoscopic structures built? In this video, we explore the EUV Photolithography System built by ASML, a 150‑million‑dollar machine that acts like a microchip photocopier, copying a chip design across hundreds of wafers. We dive deep into how 13 nm EUV light is produced, how it is focused onto a photomask, how the mask moves, the patterns on the mask, the projection optics, and how the wafer stage moves. The video covers topics such as exploring CPUs, GPUs, DRAM, SSDs, and SOCs at 00:00, introduction to photolithography systems at 01:07, printing nanoscopic lines at 04:11, basics of CPU manufacturing at 06:09, different types of lithography tools (EUV vs DUV) at 10:50, why we use extreme ultraviolet light at 12:51, producing EUV light using tin droplets at 15:31, illumination optics at 18:21, engineering inside EUV lithography at 19:09, Bragg reflections at 19:49, illumination settings at 20:54, photomask or reticle at 22:58, chip patterns on a 300 mm wafer at 25:05, projection optics Rayleigh's criterion at 28:19, lithography cluster at 30:53, wafer alignment at 32:27, photoresist at 35:07, wafer transport at 36:01, and the outro at 37:52.